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POROUS SILICON UNIT µPorSi
 




POROUS SILICON UNIT µPorSi

The porous silicon formation system µPorSi is a sufficient wet chemical solution for porous silicon formation and electropolishing of silicon. Together with our Power Supply PS2, MOT offers an all-in-one solution for this range of fabrication methods. As an option, an optical windows allows for light-assisted porous silicon formation. Because of the flexible arrangement and build-up, the porous silicon formation system μPorSi is the ideal tool either for industrial or R&D demands. Of course, customized solutions are available after clearing the technical details.



POROUS SILICON UNIT µPorSi

Data sheet


Wafer Sizes: up to 300mm

Applications: MEMS, CMOS, Sensor, PV, R&D or Production Type,


ETCHING MODULES

· Overflow circulation with filtration

· Customized Chamber amount selection

· PLC controlled

· Touch Panel for easy operation


RINSING MODULE

· Standard: Overflow Rinse,

· Optional: QDR, Pentane, IPA


BUILD-UP

· Material: PP white,

· Door material: PVC transparent,

· PP plumbing, optional PVDF or PFA tube with

PFA Flaretek Fittings

· Access Panel: Touch Panel



OPERATING ELEMENTS

· All process operating elements are integrated into the front panel,

· All electrical and pneumatically components are integrated in an independent compartment in the back side service area,

· DIW- and N2-Spray gun integrated in the working surface

General OPTIONS

· Automatic Handling (Ready for Robot Handling)

· Light assisted porous silicon formation

· fully metal-ion free wafer processing possible

· Internal Chemical Management

· Integration of pre/post process cells, Laminar- Flow- Units

· Execution as fume hood

· FM 4910 proofed material


For further questions or demands, please feel free to contact us under www.mot-semicon.com or contact@m-o-t.info

M-O-T, Mikro und Oberflaechentechnik GmbH, Krughuetterstrasse 93, D-66128 Saarbruecken, Germany

© 2002-2019 by M-O-T, All Rights reserved We are capable of


For detail please contact our expert:

Info@dehongmp.com



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