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SINGULUS Chemical Supply System

Wet Process Equipment for Semiconductor Applications

Chemical Supply Systems

· Chemical Supply Systems in different executions

· Chemical systems cover all areas of blending, dispensing, distributing and monitoring high purity bulk chemicals.

· It is designed around an application-specific platform that can be configured with various delivery engines, and is the perfect solution for bulk chemical delivery of acids, bases and solvents

Clear Execution and easy Access

· Clearly modular coordination to the process stations

· Modules are joined together forming a process line

· Materials according different standards (e.g. FM 4910)

· Execution according SEMI Standard


· Clearly positioning of the media-interfaces at the top and backside

PLC- Process control system

· Stored Programmable computer; Siemens SIMATIC S7, altern. Allen Bradley

Installation module

· Integration of recirculation system,

· feeding tanks, Pumps, Particle-filtration, temperature control systems,

· Heater / Chiller systems

· Dosing tanks, pipe work / shut-off valves

· Electrical- and control system installed separately area with Nitrogen/CDA flushing