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MOT-ETCHING SYSTEM µCHEM
 


ETCHING MODULE µCHEM



The etching unit μChem is a sufficient wet chemical process tool for all wet chemical process steps needed in the MEMS-, Semicon-, Optic- und Solar Industry. Because of the flexible arrangement and build-up, the etching system μChem is the ideal tool either for industrial or R&D demands. The complete buildup of the system is made of plastics (PP white) to guarantees a maximal resistance against chemical attacks either of acids or bases. Following the German law of environmental protection, the system has a level controlled pan, which can be used for secure storing of chemicals or lab tools. Of course, customized solutions are available after clearing the technical details.


ETCHING MODULE µCHEM

Data sheet


Wafer Sizes: up to 300mm

Applications: MEMS, CMOS, Sensor, PV, R&D or Production Type,



ETCHING MODULES

· Batch or Single Wafer Version available

for Cleaning, Etching, Dissolving etc

· Customized Chamber amount and Material Selection

· PLC controlled

· Touch Panel for easy operation




RINSING MODULE

· Standard: Overflow Rinse,

· Optional: QDR, SRD


BUILD-UP

· Material: PP white,

· Door material: PVC transparent,

· PP plumbing, optional PVDF or PFA tube with

PFA Flaretek Fittings

· Access Panel: Touch Panel


OPERATING ELEMENTS

· All process operating elements are integrated into the front panel,

· All electrical and pneumatically components

are integrated in an independent compartment in the back side service area,

· DIW- and N2-Spray gun integrated in the working surface



General OPTIONS

· Automatic Handling (Ready for Robot Handling)

· Overflow circulation with filtration

· Ultra- or Mega sonic

· Internal Chemical Management

· Carrier Movement

· Integration of pre/post process cells possible

· Integration of Laminar- Flow- Units

· Execution as fume hood

· FM 4910 proofed material


For further questions or demands, please feel free to contact us under www.mot-semicon.com or contact@m-o-t.info

M-O-T, Mikro und Oberflaechentechnik GmbH, Krughuetterstrasse 93, D-66128 Saarbruecken, Germany

© 2002-2019 by M-O-T, All Rights reserved



For detail please contact our expert:

Info@dehongmp.com